JPH01122253U - - Google Patents
Info
- Publication number
- JPH01122253U JPH01122253U JP1908488U JP1908488U JPH01122253U JP H01122253 U JPH01122253 U JP H01122253U JP 1908488 U JP1908488 U JP 1908488U JP 1908488 U JP1908488 U JP 1908488U JP H01122253 U JPH01122253 U JP H01122253U
- Authority
- JP
- Japan
- Prior art keywords
- evaporation source
- solid
- cartridge
- oven
- vaporize
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007787 solid Substances 0.000 claims description 5
- 230000008020 evaporation Effects 0.000 claims description 3
- 238000001704 evaporation Methods 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 claims 1
- 150000002736 metal compounds Chemical class 0.000 claims 1
- 150000002739 metals Chemical class 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 239000000203 mixture Substances 0.000 claims 1
Landscapes
- Electron Sources, Ion Sources (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1908488U JPH01122253U (en]) | 1988-02-16 | 1988-02-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1908488U JPH01122253U (en]) | 1988-02-16 | 1988-02-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01122253U true JPH01122253U (en]) | 1989-08-18 |
Family
ID=31234283
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1908488U Pending JPH01122253U (en]) | 1988-02-16 | 1988-02-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01122253U (en]) |
-
1988
- 1988-02-16 JP JP1908488U patent/JPH01122253U/ja active Pending